《微电子工艺及器件仿真》课程教学方法研究

Research on the Teaching Method of "Microelectronics Process and Device Simulation" Course

《微电子工艺及器件仿真》是在创新人才培养质量的背景下,为增强微电子专业本科生的创新精神和实践能力而开设的一门专业课,课程的知识结构、培养目标与行业需求紧密对接。针对课程综合性、系统性和应用性强、学生不易掌握的特点,采用精讲多练的授课模式:在讲授环节,教师对仿真文件中的仿真规则、关键语句、物理模型及需要采用的处理方法进行重点阐述,同时使用案例式教学法,便于学生掌握仿真要领;在练习环节,借助于翻转课堂模式和提供开放实验室,增强学生自主学习能力并训练修正反馈、举一反三等多维能力,取得了很好的效果。

＂Microelectronic process and device simulation＂ is a professional course to enhance the innovative spirit and practical ability of undergraduate in microelectronics specialty under the background of innovative talents gaining quality.The knowledge structure and the training goal of the curriculumclosely relates to the social requirements. In view of comprehensive,systematic and practical features of the curriculum,in order to facilitate students＇ understand,＂less teaching and more practice＂ teaching mode is used. In teaching process,teacher elaborate simulation rules,key program statements,physics model and special treatment method,at the same time,in order to facilitate students to master the simulation essence,the case teaching method is adopted;In the student practice sessions,with the help of the flipped class-room mode and providing open laboratory,to enhance their multidimensional capability,such as autonomous learning, corrective feedback,draw inferences,etc. The teaching effect can be effectively improved.