薄型光学零件加工中难点的研究

Research on Thin Optical Elements Processing Difficulties

一般将厚度与长度(或直径)的比值小于1:10的光学零件称为薄型光学零件,有时可达到1:40以上,所以薄型零件加工的难点是光圈变形的问题,而面形精度要求高就更难加工了。加工中引起光圈变形的原因主要包括胶结变形、热变形和应力变形,所以薄型光学零件加工的难点即是如何消除或减小这些变形,从而得到所需的高精度的薄型零件。文中主要阐述了上述三种变形产生的原因和解决方法,对实际生产具有一定的指导作用。

The optical elements with the thickness and length or diameter ratio less than 1：10, or sometime 1：40, are called thin optical elements. So the processing difficulty of the thin optical elements is aperture deformation, and high precision surface processing requirements make the processing work more difficult. The aperture deformation reasons in processing main include cementation deformation, thermal deformation and stress deformation. So the difficulty of thin optical elements processing is how to eliminate or reduce the deformations to get the needed high precision thin elements. The reasons and solutions of the above three kinds of deformation are introduced to provide a certain guidance to the actual production.