微纳坐标测量机间接校准方法的探究

Research on an Indirect Calibration Method of Micro/nano Coordinate Measuring Machine

针对微纳坐标测量机的高精度性能指标无法精确校准的问题,提出了一种间接校准的方案。使用量块及标准球板校准微纳坐标测量机的尺寸测量示值误差,用标准球校准仪器的探测误差。并对中国计量科学研究院的微纳坐标测量机进行了校准实验,实验结果表明,该仪器的尺寸测量示值误小于0.2μm,探测误差仅为0.125μm,校准结果均优于仪器的最大允许误差,验证了校准方案的合理可行性。

Since the high precision performance index of micro/nano coordinate measuring machine cannot be calibrated accurately, an indirect calibration solution is proposed. The measurement indication error of the micro/nano coordinate measuring machine is measured by gauge blocks and ball plate with hemispheres; The probing error is measured by calibration sphere. And a calibration experiment is done on the micro/nano coordinate measuring machining at National Institute of Metrology. The experimental results show that the error of indication of a CMM for size measurement is less than 0. 2 μm, and the probing error is only 0. 125 μm. The experiment results indicate that the error of indication of a CMM for size measurement and probing error are both less than their maximum permissible error, verifying the reasonability and feasibility of the calibration plan.