霍尔效应测试的系统误差分析

Analyzing Systematic Errors of Hall Effect Testing System

使用霍尔效应测试薄膜样品的电学性质,可获得样品的电阻率、有效载流子浓度、迁移率等性质;但由于计算公式及仪表测试精度的影响,测试得到的结果存在无法避免的误差。该文分析了范德保法测试和霍尔效应测试由于计算公式和测试仪表精度产生的系统误差,由此获知测试结果的误差。

Electric properties of thin films,such as resistivity,effective carriers density and carrier mobility,can be obtained by using Hall Effect to test thin film samples. But the test results have unavoidable errors affected by computational formulas and the resolution of testing instrument. This paper analyzes the systematic errors caused by computational formulas and the resolution of testing instrument in VDP test and Hall effect test,and thus obtains the error of test rsults.