微波技术在多晶硅制备过程中应用研究

Application of Microwave Technology in Polysilicon Preparation Process

多晶硅的制备过程是光伏产业链的重要组成部分,本文在概述微波与材料相互作用机理基础上,以硅材料中多晶硅制备过程为例,提出多晶硅生产中现有方法存在的问题,并对微波技术在多晶硅制备中的应用,以及微波反应器研究进展进行了阐述,最后展望了微波技术在多晶硅制备过程的应用前景。

The preparation process of polysilicon is an important part of the photovoltaic industry chain. Problems existed in present polysilicon preparation are investigated. Based on the overview of the interaction mechanism between microwave and material, the application of microwave technology in poly-silicon preparation is discussed, the research progress of microwave reactor is described, and finally the ap- plication prospect of microwave technology in polysilicon preparation is predicted.