飞秒激光直写制备内嵌微透镜、能源器件及生物传感器的研究进展

Research Progress in Fabrication of Embedded Microball Lenses,Energy Devices and Biosensors by Femtosecond Laser Direct Writing

飞秒激光具有超短脉宽和极高峰值强度,已广泛应用于精细加工与微纳制造领域。目前,激光直写技术用于柔性器件的制备受到极大的关注。综述了激光直写技术的四个研究方向:1)激光直写微透镜用于广角成像;2)激光制备纳米金/还原氧化石墨烯微超级电容器;3)聚酰亚胺基体上多层超级电容器的制备;4)电容生物传感器的激光制备。同时介绍了本课题组开展的相关研究工作,可为激光直写制备微纳结构器件的研究与应用及未来发展方向提供参考。

Femtosecond laser has been widely used in elaborate processing and micro/nano manufacturing field due to its ultrashort pulse width and extremely high peak intensity. At present, the fabrication of flexible devices by laser direct writing has attracted much attention. The following four research directions based on laser direct writing technology are reviewed： 1） laser direct writing microball lens for wide angle imaging; 2） laser fabrication of Au/reduced graphene oxide micro supercapacitor; 3） preparation of multilayer supercapacitor on polyimide substrate; 4） laser fabrication of capacitive biosensor. Relevant research work of our group is introduced at the same time. This paper provides a reference for the research, application and future direction of the micro/nano device fabrication by laser direct writing.