200kV全固态Marx结构方波脉冲电源设计

Design of 200 kV solid-state square-wave pulse power supply based on Marx topology

采用功率IGBT串联组合模块作为放电开关,设计了16级Marx结构的脉冲电源,能够产生可调高压方波脉冲。由9支耐压3kV的IGBT串联组成最大工作电压12.5kV的串联组合模块;通过磁隔离触发方式控制各级IGBT的同步导通和关断。输出电压从几kV至200kV可调、输出脉宽随外部触发信号宽度在1.5~10μs范围内可调、前沿小于500ns、后沿小于2.3μs;在输出电压大于100kV、输出电流20A时顶降小于2%。

The paper presents a design of high voltage square-wave pulse generator based on 16 graded Marx topology with IGBT solid-state semiconductor switch devices.A composed switch module consisted of 9serial IGBTs is adopted as the discharge switch of Marx unit.The open and close of all the IGBT switches are triggered by the inducted signal from pulse transformer.The output pulse amplitude is adjustable from several kilovolts to 200 kV.In addition,the width of output pulse is adjustable from 1.5μs to 10μs,varying with the width of the external trigger signal.The rising-edge of pulse is below 500 ns,the fallingedge is below 2.3μs.The flattop decline of the pulse is less than 2% when output voltage is greater than 100 kV and output current is approximately 20 A.