超厚多层共烧陶瓷砂轮切片方法研究

Abrasive Disc-saw Dicing Method Study of Super-thick Multilayer Co-fired Ceramic

通过精确设计和制作多层共烧陶瓷板顶面、底面上的成组切片对准线,合理选配划片机的砂轮-法兰组,稳定装卡待切片陶瓷板,科学设定相关切片工艺参数,并采取分别从陶瓷板的顶面、底面多刀渐进加深旋切贯通的方法,很好地解决了多层共烧陶瓷加工中常用单面切片最大切厚只能达到5mm的难题,有效实现了厚度为5~10 mm超厚多层陶瓷的分切加工。试验结果表明,所加工的厚度为8.92mm单元陶瓷产品的长、宽尺寸准确度优于±0.04mm,侧壁切面平面度<0.02mm。

By the accurate design and manufacture of group dicing position lines on the top and bottom surfaces of multi- layer co-fired ceramic substrate, choose the reasonable disc-saw/flange set of dicing machines, stable mounting of the ceram- ic substrate, and scientific set-up of related dicing process parameters. By means of cutting from the ceramic substrate＇s top surface, the bottom surface separately in several depth feed spin-cutting, the difficult problem which the maximum cutting thickness of common single-side dicing in multilayer co-fired ceramic＇s manufacture can merely reach 5 mm. The cutting-a- part of 5-10 mm super-thick multilayer co-fired ceramic is fulfilled effectively. The experiment results show that the length and width accuracy of 8.92 mm thick diced unit ceramic products is better than ± 0. 04 mm, and their diced sidewall＇s planeness is less than 0.02 ram.