摘要
为了提高时栅位移传感器的测量精度,介绍了一种不通过提高时钟频率而提高时栅测量精度的方法—游标细分法。借鉴于游标卡尺对齐细分的测量方法,对时栅时钟脉冲进行二次细分,实现了高分辨率、高精度时间量的测量,避开了复杂的电子细分。为了验证该方法的有效性,搭建了一套实验平台,实践证明:采用游标细分方法后,时栅位移传感器的时钟插补脉冲在41.7 ps的高分辨率下,测量误差峰峰值为±1.4″,实现了更高精度的测量。
In order to improve measurement precision of time grating displacement sensor, a method is introduced which not by increasing frequency of clock, vernier caliper subdivision method. Using vernier caliper measure method for reference, which subdivide clock of time grating again, high resolution and high precision time measurement are achieved. Meanwhile, avoid complicated electronics subdivision. To verify validity of this method, a set of experimental platform is set up. Experiment demonstrates that peak value of measurement error is ±1.4″, when the time grating measurement is worked under 41.7 ps high resolution clock interpolation pulse, higher precision measurement of time grating is achieved.
出处
《传感器与微系统》
CSCD
2017年第1期81-82,86,共3页
Transducer and Microsystem Technologies
关键词
时栅
游标细分法
时钟插补脉冲
高分辨率
time grating
vernier caliper subdivision method
clock interpolation pulse
high resolution
