用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计

Design of electrostatic comb driver used for adjustable GaN micro mirror

提出并设计了一种用于硅基氮化镓(Ga N)可调微镜的静电梳齿型微驱动器。利用有限元软件建立了该器件的几何结构模型,对器件的结构进行了仿真优化。此外,采用微机电系统(MEMS)加工工艺,制作出了用于硅基氮化镓可调微镜的梳齿型微驱动器,并对其驱动特性进行测试。测试结果表明:所制作的微驱动器的位移随着电压的变化呈二次方关系,与仿真结果基本一致。当加载驱动电压为200 V时,微驱动器的驱动位移可达到1.08μm。

An electrostatic comb driver used for adjustable GaN micro mirror is proposed and designed. By using FEM software, structure model is constructed for the device and the structure of the comb driver is simulated and optimized. Besides, fabricate comb micro driver used for GaN-on-Si using micro-electro-mechanical system （MEMS） process and driving characteristic of electrostatic comb driver is test. Test result demonstrates that the displacement of the driver has a quadratic relation with drive voltage which is consistent with simulation result. Drive displacement of the proposed micro actuator is 1.08 μm under driving voltage of 200 V.