摘要
采用闭合场非平衡磁控溅射离子镀(CFUMSIP)技术在M2工具钢和Si片表面沉积CrN和CrMoN梯度涂层,利用SEM、EDS、XRD、纳米压痕仪和摩擦磨损试验仪研究了薄膜组织、成分、相结构、硬度和摩擦磨损性能。结果表明,CrMoN涂层和CrN涂层呈现出fcc结构,CrMoN涂层的表面比CrN涂层更为紧凑致密。CrMoN涂层的纳米硬度和弹性模量高于CrN涂层,CrMoN涂层的摩擦系数和磨损率均小于CrN涂层。
CrN and CrMoN coatings were deposited on M2 tool steel and silicon wafer substrates by closed-field unbalanced magnetron sputtering ion plating （CFUMSIP）technique. The microstructure, composition, phase structure, hardness and friction and wear properties of the coatings were studied by SEM ,EDS ,XRD, nano-indentation and pin-on-disk tribometer. The results show that CrN and CrMoN coatings exhibit fcc structure. The surface of CrMoN coating is more compact than that of CrN coating.The nano-hardness and elastic modulus of CrMoN coating is higher than that of CrN coating . The friction eoetticient and wear rate of CrMoN coating is lower than that of CrN Coating.
作者
王宇星
潘健
张侠
WANG Yuxing PAN Jian ZHANG Xia(College of Mechanical and Electrical Engineering, Quzhou College of Technology, Quzhou 324000, China College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014 ,China)
出处
《热加工工艺》
CSCD
北大核心
2017年第2期134-136,138,共4页
Hot Working Technology
基金
浙江省自然科学基金资助项目(Y15E050060)
