真空热处理对多弧离子镀TiAlSiN涂层性能的影响

Effects of Vacuum Heat Treatment on Properties of TiAlSiN Coatings Prepared by Arc Ion Plating

为提高TiAlSiN涂层的力学性能,研究了真空热处理对多弧离子镀TiAlSiN涂层微观组织和力学性能的影响。利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、自动划痕仪、纳米压痕仪、摩擦磨损测试仪等表征其表面形貌、物相组成和力学性能。结果表明:热处理引起了涂层的晶格畸变,降低了TiN固溶体相的平均晶格常数,导致其衍射峰向高角度偏移;热处理会粗化涂层表面,并导致TiAlSi中间过渡层界面消失。经过800℃热处理后,涂层的纳米硬度和结合力达到最大值,分别为35.01 GPa和54.45 N;涂层的平均摩擦因数最小,由热处理前的0.679降低至0.372,比热处理前下降了约45.2%。

In order to improve the mechanical properties of TiAlSiN coatings, the effects of vacuum heat treatment on the microstructure and mechanical properties of TiAlSiN coatings prepared by arc ion plating was studied. The surface morphologies, phase composition and mechanical properties of the TiAlSiN coatings were characterized by scanning electron microscopy （SEM）, X-ray diffraction （XRD）, scratch tester, nanoindentor, and so on. The results show that heat treatment leads to the lattice distortion of the TiAlSiN coatings, which reduces the average lattice constant of TiN solid-solution phase and then causes the shift of diffraction peaks towards high angle. Heat treatment can cause a coarsening tendency on the coating surface and contribute to the disappearance of TiAlSi interlayer. After heated at 800 ℃, the nano hardness and adhesive force of the TiAlSiN coatings reach the maximum values, 35.01 GPa and 54.45 N, respectively. In the meantime, the average friction coefficient has the minimum value and reduces about 45.2% from 0.679 to 0.372 before and after heat treatment.