摘要
采用阴极电弧离子镀技术沉积了厚度为16μm左右的CrN膜层,然后在其上以阴极电弧+磁控溅射+阳极层离子源复合技术沉积了厚度约3μm的类金刚石(DLC)膜层,分别用扫描电镜、显微硬度计、划痕仪、摩擦磨损试验仪分析和测试了CrN、DLC、CrN/DLC等3种膜层的表面和截面形貌,厚度,显微硬度,结合力以及耐磨损性能。结果表明,采用上述方法制备的CrN/DLC复合膜具有良好的综合性能,膜层界面明晰、结构致密,膜基结合力大于60 N,显微硬度达到2200~2600 HV,磨损率为1.8×10^(-16)m^3/(N·m),耐磨损性能优于CrN和DLC单层膜。
A CrN/DLC composite film with a thickness of 19 μm was deposited by cathodic arc ion plating, on which a ca.3μm-thick diamond-like carbon （DLC） film was then deposited by a method combining cathodic arc ion plating, magnetron sputtering and anode layer ion source technique. The surface and cross-section morphologies, thickness, microhardness, adhesion strength and wear resistance of CrN, DLC and CrN/DLC films were analyzed and tested by scanning electron microscope, microhardness tester, scratch tester and tribometer. The results showed that the CrN/DLC composite film has a compact structure with a clear interlayer interface and exhibits good comprehensive performance as shown by adhesion strength 〉60 N, microhardness 2200-2600 HV and wear rate 1.8 × 10^-16 m^3/（N. m）. The wear resistance of CrN/DLC composite film is superior to that of the single CrN or DLC film.
作者
李福球
林松盛
林凯生
陈焕涛
LI Fu-qiu LIN Song-sheng LIN Kai-sheng CHEN Huan-tao(Guangdong Institute of New Materials, National Engineering Laboratory for Modem Materials Surface Engineering Technology, Key Lab of Guangdong for Modem Surface Engineering Technology, Guangzhou 510651, China)
出处
《电镀与涂饰》
CAS
CSCD
北大核心
2017年第1期25-30,共6页
Electroplating & Finishing
基金
广东省院平台建设项目(2016GDASPT-0206,2016GDASPT-0317)
关键词
氮化铬
类金刚石
复合薄膜
阴极电弧离子镀
磁控溅射
阳极层离子源
摩擦学
chromium nitride
diamond-like carbon
composite thin film
cathodic arc ion plating
magnetron sputtering
anode layer ion source
tribology
