有滞留时间约束的集束型装备在线调度方法

Online Scheduling Method of Cluster Tools with Residency Time Constraint

针对半导体制造中有滞留时间约束的集束型装备,研究了客户紧急订单、返工、新产品试制等临时晶圆到达时的在线调度问题,提出了不改变已有晶圆调度的前提下,利用资源空闲时间区间的两层在线调度方法。外层算法通过改进量子进化算法用以优化临时晶圆加工排序;内层算法在给定晶圆排序的基础上,采用后向逐级递推的策略从资源的空闲时间区间获得可行解,利用逆序最大逐级回溯策略在可行解空间获得晶圆的加工开始时间。通过不同规模测试问题上的仿真实验和算法比较,验证了提出方法的有效性。

For cluster tools with residency time constraints in semiconductor manufactory, online scheduling problem was studied when temporary wafers arrived with emergency order, rework and new product development, et al. Utilizing available resource interval, the two-layer online scheduling method was proposed without changing existing schedule. The outer layer algorithm used an improved quantum evolutionary algorithm to optimize processing order of temporary wafers. Based on the results, the inner layer algorithm gained feasible solutions from available space by backward stepwise recursive strategy, and determined start time of wafer in feasible solution space by means of reverted sequence maximum backtrack strategy. Simulation results and comparisons on benchmarks with different scales demonstrate the effectiveness of the presented method.