离线装料技术在直拉法硅单晶生产中的应用

Application offline charging technology in czochralski monocrystalline silicon production

直拉(CZ)单晶硅生长炉是目前世界上最主要的单晶硅生产设备,但其传统的装料工序存在着耗时长、成本高、安全系数低及产品质量低等隐患。采用离线装料技术可使产品合格率稳定在81.4%以上,单炉生产周期缩短了1h左右,单炉每月产能增加15kg,同时人力成本也得到了相应的控制,真正达到了降本增效的目的。

Czochralski（CZ）monocrystalline silicon growth furnace is the main production equipment for monocrystalline silicon.But the traditional charging process has problems of time-consuming and high cost,low safety and low quality in product.With the popularization and application of off-line charging technology,the qualified rate of product is more than 81.4%,shortening the production cycle of single furnace for about 1h.The production capacity of a single furnace per month is increased by 15 kg,while labor cost has also been correspondingly controlled,achieving the purpose of cost reducing and benefit increasing.