摘要
由于压电陶瓷具有迟滞效应,为了更好地控制压电偏摆台,减少迟滞效应对控制系统的影响,首先通过坐标变换对偏摆台建立了Prandtl-Ishlinskii(PI)迟滞模型,然后求解其逆模型,并设计前馈控制器,使输入、输出角度间具有较好的线性关系。最后在此基础上进行比例-积分-微分(PID)反馈控制,构成复合控制系统,大幅度提高了定位精度。实验结果表明,最大定位误差为2.2μrad,具有良好的控制效果。
Because of the hysteresis effect of piezoelectric ceramic,in order to control the piezoelectric oscillating table better and reduce the influence of the hysteresis effect on the control system,The Prandtl-Ishlinskii(PI)hysteresis model of the oscillating table is established by the transformation of coordinates first.The inverse model of the PI model is solved and the feedforward compensation controller is designed to have a good linearity between the output and the input angels.Finally,on the basis of PI model,the compound control system is built by adding PID feedback controller and the positioning accuracy is improved significantly.The experimental results show that the maximum error of positioning is 2.2μrad and the control effect of system is excellent.
出处
《压电与声光》
CAS
CSCD
北大核心
2017年第1期40-43,共4页
Piezoelectrics & Acoustooptics
基金
吉林省重大科技攻关专项基金资助项目(No.20126015)
关键词
迟滞
压电偏摆台
PI迟滞模型
逆模型
复合控制
hysteresis
piezoelectric oscillating table
PI hysteresis model
inverse model
compound control
