比较法研究微细尺度氮化硅表面自然对流换热

Investigation of Naturel Convention Heat Transfer Around Microscale Silicon Nitride Surface Using Comparative Method

微细尺度的对流换热与常规尺度的有很大不同,采用比较法研究了微细尺度水平氮化硅表面空气自然对流换热的问题。利用标准CMOS工艺和简单的post-CMOS工艺制作出微热板(MHP)测试结构并实验测试,对测试方法的准确性进行了有限元仿真。结果表明:面积为43.5 mm×43.5 mm的水平氮化硅表面的自然对流的传热热导为2.63×10^(-5)W/K,由此计算出的自然对流系数高达1.39×10~4W/(m^2·K),远远高于常规尺度下空气自然对流系数。

Microscale natural convetion heat transfer is very different with that at macro scale. Comparative method is used to investigate naturel convention heat transfer around horizontal surface of the microscale silicon nitride. Micro Hot Plate（MHP）with activity area of 43.5 μm×43.5 μm,which is manufactured by standard CMOS and simple post-CMOS processes,is used for measurement.And accuracy of the method is studied by finite element simulation. The results show that the air conductance of horizontal silicon nitride surface is 2.63 × 10^-5 W/K. The naturel convention coefficient is 1.39×10^4 W/（m2·K）,which is much larger than that at macro scale.