高纯硅烷的制备方法研究

Study on the preparation of high purity silane

分析了国内外硅烷的研究概况,并结合多氟多化工股份有限公司研究开发的高纯硅烷制备的工艺过程,重点分析了实验原料、实验方法、工艺流程、工艺关键点和工艺特点等,简要对比了该工艺制备的高纯硅烷与国外(美国、白俄罗斯等)所用标准的差异。指出高纯度硅烷作为电子化工材料、光电子、微电子产业的重要支撑材料之一,其应用领域广泛,发展空间巨大。该工艺产品能耗相对较低,可进行工业应用的推广。

The research situation of silane at home and abroad was analyzed.Combining the preparation process of high purity silane researched and developed by Do-Fluoride Chemical Co.,Ltd.,the experimental materials,experimental method,technological process,technical key points,and process characteristics were analyzed in detail.The difference between the standards of the process for preparation of high purity silane and abroad（the United States and Belarus,etc.） was simply compared.It was also pointed out that the high purity silane had a wide range of applications,and huge space for development,as one of the important supporting materials for the electronic chemical materials,optoelectronic,and microelectronic industry.Therefore,it′s suitable for the promotion of industrial application