弯振复合型单足压电驱动器设计

Design of and experiment on a bending hybrid ultrasonic motor with single driving foot

为获得实用的小型压电驱动器,选择梁的三阶弯振作为压电驱动器的振动模态,并通过有限元法对压电驱动器进行了设计与分析.通过模态分析,确定压电驱动器的结构参数;对压电驱动器进行了电学特性仿真分析,研究其导纳特性,并获得其理论机械品质因数与机电耦合系数.制作了压电驱动器样机,进行了阻抗特性测试.最后,对压电驱动器进行了机械输出特性测试.实验结果表明,所设计的压电驱动器最高速度可达735mm/s,最大输出推力为1.1N.

For the aim of miniaturization, this work chooses the third bending mode of beam as the piezoelectric actuator＇s vibration mode. By using the finite element method, the proposed motor is designed and analyzed. By modal analysis, the parameters of structure are designed. By harmonic analysis, the mechanic quality factor and electromechanical coupling factor of the proposed actuator are obtained. Based on theory and simulation, a prototype of the proposed piezoelectric actuator is fabricated. Impedance analyses are executed by the Agilent precision impedance analyzer. Mechanical output characteristics of the prototype are obtained experimentally. The maximal no-load velocity of the proposed motor is 735 mm/s and the maximal output force is 1.1 N.