还原炉运行间隔时间对三氯氢硅总进料平稳性的影响

Influence of the Run Time Interval of Polysilicon CVD Reactor on the Stability of Total TCS Feeding

根据单台24对棒还原炉的SiHCl_3进料曲线,采用Matlab编程,分析了30台还原炉的运行间隔时间对SiHCl_3总进料量平稳性的影响,并计算出最合理的运行间隔时间为4 h,方法和结果可作为实际生产运行的参考和指导。

According to the TCS feeding curve of only one polysilicon CVD reactor, by Matlab programming, influence of the run time interval of 30 polysilicon CVD reactors on the stability of total TCS feeding was analyzed, and it＇s calculated that 4 h is reasonable time interval. The method and result can be applied into the actual operation run.