摘要
文章阐述了高纯气体产品质量监测的重要性并分析了影响高纯气体质量监测准确性的各种因素(掌握正确的取样技术;配备高气密性、不产生交叉污染的配气和测量装置;选择高灵敏度的监测方法;建立完善的质量保证体系。)。
The paper describes the importance of product quality monitoriny of high purity gas and analyses various factor which effect accuracy of quality monitoring of high purity gas （mastering proper sampling craft; providing equipment of preparing mixed gases and measurementing that have high airtight and don＇t happen cross pollution; selecting monitoring method that have high sensitivcty; establishing perfect quality ensurance system）
出处
《广东化工》
CAS
2017年第1期117-118,共2页
Guangdong Chemical Industry
基金
廊坊市科学技术研究与发展计划自筹经费项目(2015011058)
关键词
高纯气体
杂质分析
取样技术
测量装置
质量保证体系
High purity gas； impurity analyses；sampling technique；measurement device；quality ensurance system
