热式气体质量流量传感器的工作原理

The Working Principle of Thermal Gas Mass Flow Sensor

气体质量流量传感器是气体质量流量控制器中的一个重要的核心部件。传感器性能好坏对气体质量流量控制器的性能指标,如零漂、精度、线性、重复精度、响应时间等重要指标参数有直接的影响。好的传感器能够提升产品的质量;反之,不好的传感器会导致产品的品质下降,甚至成为不合格品。深入研究气体质量流量传感器,对提升传感器的性能和提升质量流量控制器的质量起至关重要的意义。本文主要从传感器的工作原理进行分析,通过数学推理的方法,得出对传感器性能有重要影响的参数,从而为气体质量流量传感器的设计和改进提供理论依据。

The gas mass flow sensor is one core component of the gas mass flow regulator. The performance of the sensor can directly affect the performance parameter of the gas mass flow regulator, such as zero drift, accuracy, linear, repeat precision, and response time. A good sensor can improve the product quality. Otherwise, if the product is equipped with a bad sensor, its quality will be degraded even become unaccepted. So, it is of significant importance in the aspect of enhancing performance and quality of the sensor＇s by a deep research of the gas mass flow sensor. This paper aims to analysis the sensor＇s working principle, find out the important parameters for the sensor by the means of maths inference in order to supply the theory basis for the design and improvement of the gas mass flow sensor.