一种MEMS压电大位移驱动器设计分析

Design and Analysis of a MEMS Piezoelectric Large Displacement Actuator

以压电双晶片为研究对象,设计出了4种结构形式的位移驱动器,并对设计的4种位移驱动器进行了性能分析,发现压电双晶梁的结构简单,但输出位移最大;对简单压电双晶梁进行了研究,分析了各因素对输出位移的影响,最终确定了合理的结构尺寸和弹性垫片的选用材料。设计的简单压电双晶梁输出位移达到223μm,满足至少200μm的输出位移要求,为驱动某引信安全系统中的扁平MEMS结构提供了一种简便可行的方案。

Four structure forms of displacement actuator was designed on the basis electric bimorph. The performance was respectively analysed. It is found that a si lectric bimorph beam structure outputs the maximum displacement. The simple of t mpl he piezo e plezoe piezoelectric bimorph beam structure was researched and the factors which influence the output displacement were investigated. Ultimately, a reasonable structure size and elastic shim material were determined. The outputs displacement of simple piezoelectric bimorph beam structure designed reaches 223 μm, meets at least 200μm output displacement requirement. It provides a simple solution to drive a flat MEMS structure in a fuze safe and arm system.