海洋专用高精度压力传感器温度特性及补偿算法研究

Study on the Temperature Characteristics and Compensating Algorithm for High-Accuracy Oceanographic Pressure Sensors

针对压阻式压力传感器存在易受环境温度影响的缺点，提出一种新型温度补偿算法。文中使用高低温试验箱和高精度活塞式压力计对压力传感器进行定标实验．考察压力传感器的温度特性。结果表明传感器输出受温度影响较大且温漂系数与压力呈线性关系，经过温补算法修正后，传感器在-5～50℃、0～60MPa的范围内实现了0．03％F．S．的压力测量精度。该温度补偿算法实现了传感器温漂特性与时漂特性的分离．具有良好的可操作性和实用性。同时．提出了一种低通滤波的方法．可以较好地抑制环境温度快速变化时传感器出现动态测量误差的问题。

Aiming at the shortcomings of piezoresistive pressure sensors, which is susceptible to ambient temperature, this paper presents a new temperature compensating algorithm. A temperature chamber and a high- precision piston pressure gauge are used to calibrate the pressure sensor, so as to investigate the characteristics of the pressure sensor under different ambient temperatures. The results show that the sensor output is significantly influenced by temperature and that the temperature coefficient has a linear relation with pressure. After the temperature compensating algorithm is applied, the pressure measurement accuracy of 0.03% F.S. is realized in the range of -5 - 50 ℃ and 0 - 60 MPa. The temperature compensating algorithm achieves the separation of temperature drift characteristic and time drift characteristic, and thus has good maneuverability and practicability. A low-pass filtering method is also proposed, which can better restrain the problem of dynamic measurement error when the ambient temperature rapidly changes.