多晶硅铸锭炉加热器的优化及其热场模拟

The Heater's Optimization and Numerical Simulation of Thermal Field for Multi-crystal Silicon Casting Furnace

以美国GT Solar公司DSS^(TM) 450型多晶硅铸锭炉为模型,提出了一种新的加热器优化设计方案。通过建立热力学三维模型,利用数值模拟的方法,对加热器优化前后铸锭炉内部的热场分布进行仿真,发现优化加热器对边缘区域的中间部分的温度有较好的补偿作用,在一定程度上改善了热场分布的均匀性;与未优化情况相比,热场分布的等温线更加平直,曲率更小;在同样的加热功率条件下,晶体硅可以被加热到更高的温度,优化后的加热器具有更高的加热效率。

Taking GT Solar Corporation＇s DssTM450 type muhi-crystal silicon casting furnace as a model, a new heater optimization design scheme is proposed. By building the three dimension thermal model,the thermal field＇s temperature distribution in the multi-crystal silicon casting furnace was simulated. We find that the optimized heater has good temperature compensation in the middle part of the furnace＇s edge region ,and improves the uniformity of thermal field＇s temperature distribution to a certain extent. Compared with the not optimized, the isotherms of the thermal field distribution are more straight and the curvature is smaller; Under the same heating power, the crystalline silicon can be heated to a higher temperature, and the optimized heater has a higher heating efficiency.