激光掺杂制作选择性发射极电池扩散工艺的研究

Investigation of Diffusion Process for Laser Doping Selective Emitter Solar Cell

研究了激光掺杂制作选择性发射极电池的三氯氧磷(POCl3)扩散工艺。优化扩散时间、气体流量和温度控制参数,结合三氯氧磷扩散后磷硅玻璃(PSG)层中磷浓度、扩散层深度、表面掺杂浓度、扩散后方阻及激光后方块电阻的测试,得到了合适的三氯氧磷扩散工艺。与未采用优化工艺的电池相比,光电转换效率提升约0.3%。

POCl_3 diffusion process of selective emitter solar cell was investigated.A suitable POCl_3 diffusion process was presented and verified,by means of the optimization of process time,flux of gas and temperature control,as well as some tests of phosphorus concentration in PSG layer,depth of diffusion,surface phosphorus concentration,sheet resistance after POCl_3 diffusion and laser doping.Efficiency of selective emitter solar cell realizes absolute 0.3% increase compared with that of standard solar cell.