基于PROFIBUS的智能化金属颗粒镀膜测控系统设计

Design of Intelligent Metal Particle Coating Measurement and Control System Based on PROFIBUS

国内高真空溅射镀膜机多采用单一PLC主机控制的集中式测控系统,可靠性和抗干扰能力弱,增加了系统的不稳定性。设计了一种基于嵌入式控制器的分布式网络化真空镀膜机测控系统,采用ARM为核心的嵌入式主控器通过PROFIBUS-DP现场总线连接低温泵机组、冷热水机组、溅射室门变频器、溅射电源、转鼓电机变频器、电解质分析仪等,这种网络拓补结构具有可扩展性强、信息化集成度高、控制工艺在线优化便捷等特点。此外,在上位机监控系统中设定不同的真空溅射镀膜参数,并实现对溅射过程中室内压强、气体浓度、水温等重要参数的实时监控和报警信息处理,保证了溅射镀膜系统可靠、稳定地运行。

In this paper,a distributed networked vacuum coating machine measurement and control system are designed,which is based on the embedded controller using ARM as the core.The controller,the low temperature pump unit,the cold and hot water unit,the sputtering chamber gate inverter,the sputtering power,the drum motor frequency converter,the electrolyte analyzer,etc.can be connected together by PPOFIBUS-DP fieldbus.The networked system has the characteristics of high scalability,high information integration,on line optimization control technology.