悬浮石墨烯薄膜的压力敏感特性建模与仿真分析

Modeling and Simulation Analysis on Pressure-Sensing Characteristics of Suspended Graphene Membranes

针对悬浮式石墨烯压力传感器设计缺乏定量分析方法的问题,本文采用有限元建模仿真方法,建立了矩形、方形和圆形等3种不同形状悬浮石墨烯薄膜的压力敏感特性模型,仿真得到了其压力-应变关系,然后进行了不同条件及与实测值的对比分析.对比分析结果验证了有限元建模仿真的准确性,表明3种形状薄膜中矩形薄膜的中心形变位移和应变最大,且二者随薄膜尺寸的增大而增大.上述结果为悬浮式石墨烯压力传感器的结构与性能优化设计提供了有效指导.

In order to solve the problem of lacking quantitative analysis methods for designing pressure sensors based on suspended graphene,the pressure-sensing characteristic models of suspended graphene membranes in three different shapes：rectangular,square and circular are established,using finite element modeling and simulation.After the simulation,Functions between pressure and strain were obtain.Then they were compare and analyze under different conditions,following by contrast with the measured values in the literature.The results of comparing verify the accuracy of finite element modeling and simulation,which shows that among the three shapes,the central deformation displacement and strain of rectangular membrane are the largest,and the two quantities increase with the increase of membrane size.The results above provide an effective guidance for optimizing the structure and performance design for pressure sensors based on suspended graphene.