多晶硅还原炉夹套式封头热-机械耦合场有限元分析

Finite Element Analysis of Jacketed Head of Polysilicon Reduction Furnace under Thermal-Mechanical Coupling Field

多晶硅还原炉是西门子法生产多晶硅的主要设备,由于进气管、出气管和电极座等部件都布置在封头处,导致封头温度分布不均匀,引起很大的温差应力,因此还原炉封头处存在很大的结构安全隐患。本文利用ANSYS,采用APDL语言,建立了某大型多晶硅还原炉夹套式封头1/4有限元模型。考虑到材料的非线性特性,对夹套式封头结构进行了仿真计算,给出了整体结构、上下花板和电极座温度分布云图,进而得出其应力分布变化规律,为多晶硅还原炉设计提供参考依据。

Polysilicon reduction furnace is the main equipment for the production of polycrystalline silicon by SIEMENS process. The air inlet pipes, outlet pipes, the electrode holders and the other components are arranged in the jacketed head. Thus, the temperature distribution of the jacketed head is uneven and cause great temperature stress, leading to the great structural safety problems in jacked head. In this paper, APDL language is applied to build a 1/4 jacket head of polysilicon reduction furnace. Considering the nonlinear features of the materials, Temperature distribution cloud image of the overall structure, the flower board and an electrode seat temperature distribution are obtained and the stress distribution variation regularity is acquired through the simulation of the jacket head structure, providing reference for the design of polysilicon reduction furnace.