一种高精度石英挠性加速度计自动测试系统设计

Design of high precision automatic test system for quartz flexure accelerometer

石英挠性加速度计(简称石英加表)作为惯性平台的核心器件,其精度、可靠性是国内外研究的重点。该文研发了一套加速度计自动测试系统,采用强制均温和半导体制冷片调温的温控仪实现了采样电阻的精确温控,可针对不同采样电阻对测试精度的影响,应用采样电阻补偿算法,有效提高了温度稳定性和采样测量精度。经试验验证,采样电阻最小误差为百万分之4.3,可控采样电阻温度变化小于0.02℃,输出最大温度漂移为0.01 V,满足实际工程需求。

The quartz flexible accelerometer （referred to as quartz aecelerometer） as the core device of inertial platform, its accuracy and reliability is the focus of research at home and abroad. In this paper, a set of automatic test system for accelerometer is developed. In this system, the precision temperature control of the sampling resistor is realized by using the temperature controller with function of forced uniform temperature and temperature control by semiconductor cooling plate. With the application of sampling resistor compensation, it can solve the problem of different test accuracy with different sampling resistor. It effectively improves the stability of temperature and accuracy of sampling measurement. The experimental results show that the minimum error of the sampling resistance is 4.3 ppm, the temperature change of the controllable sampling resistor is less than 0. 02 ℃ , and the output maximum temperature drift 0. 01 V, which meets the practical engineering requirements.