直射式激光位移传感器光束入射角对测量精度的影响

Effect of the Beam Incident Angle of Direct-incident Type Laser Displacement Sensor on Measuring Precision

针对激光位移传感器测距精度受光束入射角影响的问题,给出了一种测量入射角与位移测量精度之间关系的实验方法。通过实验得出如下结论:随着入射角α的增大,传感器测得的距离小于实际距离,其值随α的增大而增大。对于不同的被测表面,当α小于一定角度时,位移测量误差受α影响较小,而当α大于这一角度时,测量误差明显增大,甚至出现测量失真。而且,相同入射角α情况下,被测件表面光洁度高,则测量误差小。

Directed towards to the problem that the measurement accuracy of laser displacement sensor isaffected by its beam incident angle, this paper presents an experimental method to measure relationship betweenincidence angle and measurement accuracy. The following conclusions are drawn from the experiments： thedistance measured by the sensor is smaller than the actual distance, and the difference between the two isincreasing with the increase of incident angle a. For the different measured surface, the displacementmeasurement error is less affected when the angle a is less than certain angle, but once a is larger than this angle,measurement error will significantly increase, or even distorts. Moreover, for the same a, the higher themeasured surface finish is, the smaller measurement error is