精密机床负压吸附导轨的研究

Research of Vacuum Suction Guide on Precision Machine Tools

介绍了负压吸附导轨的工作原理,针对精密机床开式静压方式工作过程中存在的漂移和运动不稳定问题,提出采用负压发生器与小孔节流流量控制器相结合的新型负压吸附静压支承技术,建立了负压吸附导轨计算模型,并对气膜刚度进行了分析计算,保证了精密机床开式静压导轨所需的气膜厚度和刚度。并将该技术应用到机床导轨中,应用表明:提高了机床运动稳定性及工件的加工精度。

The working principles of vacuum suction guide were introduced. Aiming at the problems of drift and movement insta- bility during the working process of precision machine tools in open static pressure mode, a new vacuum suction static pressure support- ing technique that combining vacuum suction generator with flow rate controller of pinhole throttle was introduced. The computation model of vacuum suction guide was established. Also the gas film stiffness was analyzed and calculated. The air film thickness and stiff- ness of open-type static pressure guide were ensured. Also this technique was applied to machine tool guide. The application shows that the motion accuracy of machine tools, as well as the machining accuracy of work piece is improved.