曲边ZnO微米线酒精气敏传感器件的研究

Research on the ethanol gas sensor based on curved-side ZnO microwire

通过改变生长源中氧化锌与碳粉的比例,利用化学气相沉积的方法生长出曲边ZnO微米线,并通过扫描电子显微镜对曲边ZnO微米线进行形貌表征。表征结果显示曲边ZnO微米线的横截面每一条边均向内弯曲,这主要是由于生长过程中ZnO晶体快速形核,从而导致微米线非线性生长。利用单根曲边ZnO微米线制备酒精气敏传感器,研究其气敏性能。由于曲边ZnO微米线比表面积较大,同时特殊的形貌使其表面更具活性,从而使曲边ZnO微米线酒精气敏器件气敏性能更好,恢复时间更快,这也使得曲边ZnO微米线在酒精测试方面更具推广性。

By regulating the ratio of ZnO and carbon powder in the growing source, the curved-side ZnO microwires are grown with chemical vapor deposition method. The morphologies of the ZnO micro-wires are characterized by scanning electron microscopy, and the results show that each side of cross section of the microwire is bent inwards. The main reason is that faster nucleation rate of ZnO crystal leads to the nonlinear growth ofZnO microwire. A single ZnO microwire is used to fabricate an alcohol gas sensor, and the gas-sensitive properties of the sensor are researched. Bigger specific surface area and more active of surface of curved-side ZnO microwire make the sensor exhibits better ethanol sensitive performance and faster recovery time, so the curved-side ZnO microwire is worthier than the others to be popularized in ethanol detection.