电极移动速度效应的空气动力学分析

Air dynamics analysis on electrode moving speed effect

基于空气动力学原理解释了电极向靶运动过程中放电间隙形成局部低真空的机理.结合小间隙放电的双过程模型,初步阐释了气体压强变化对放电间隙内部相关电参量的影响机理,进而分析电极速度对放电参数的影响.基于我们团队自主研制的电极移动速度效应检测仪,进行反复实验,对大量的试验数据进行仿真分析,探索小间隙静电放电过程中放电参数对电极移动速度的依赖性.结果表明:电极移动速度与放电电流峰值、放电电流脉冲上升速度,具有高度的正相关性;与放电电流脉冲下降速度具有高度的负相关性.研究结果对于推进非接触静电放电测试标准的提出具有一定的参考意义.

The formation mechanism of partial vacuum due to electrode moving speed to the target in electrostatic discharge（ESD）process is explained based on the principle of air dynamics.Combining with double process mini-gap ESD model,the mechanism of gas pressure variation effect on parameters in ESD is discussed,and the influence of electrode moving speed on the discharge parameters is analyzed.Processing of large amount of data and simulation were performed based on experiment with our newly invented ESD measurement system,to search relationship of discharge parameters relying on electrode moving speed.Electrode moving speed,as a result,has strong positive correlation with current peak and current rise slope,but has strong negative correlation with current fall slope.The consequence of the work may provide benefit reference on proposal to non-contacted ESD test standard.