基于波长路由的光真延时模块

Integrated Optical True Time Delay Module Based on Optical Wavelength Router

设计并制作了一种全集成的基于波长路由的光真延时(OTTD)模块。该模块由两个相同的通道间隔为1.6nm的16×16阵列波导光栅路由器(AWGR)与一组波导延时线阵级联而成。测试结果表明该模块性能优异,工作波长通道间串扰小于-27dB,光纤端到端峰值波长的插入损耗约为12dB。采用矢量网络分析仪测试得到延时线阵提供的光延时步长为(6.24±0.4)ps。该模块中两个阵列波导光栅路由器及延时线阵均被集成在一块硅基片之上,并且都由二氧化硅(SiO_2)波导制作而成,整个器件尺寸为3.5cm×3.5cm。

A fully integrated optical true time delay （OTTD） module based on optical wavelength router is designed and fabricated. Two 16×16 arrayed waveguide grating routers （AWGR） with channel spacing of 1.6 nm are cascaded with a group of waveguide delay lines to form the module. The experimental result shows that this module has excellent performance, the device crosstalk at working wavelengths is lower than -27 dB, and the insertion loss is about 12 dB at peak wavelength end to end. The optical delay increment of （6.24±0.4） ps is measured experimentally by vector network analyzer. Two AWGR and delay line array of the module are integrated on the silicon substrate. This device is fabricated with silicon dioxide waveguide and the whole size is 3.5 cm×3.5 cm.