摘要
红外非制冷热探测器的制备,通常在CMOS读出电路上制作悬空结构来实现。传感器将吸收的热量转化为电信号由检测电路检出,但该结构吸收效率偏低。本研究提出了一种基于光栅陷光结构激发表面等离子体谐振吸收的红外探测器结构。基于电磁场理论分析了结构参数对红外光学吸收的影响,利用数值模拟的方法,研究了金属-介质-金属三明治结构红外探测器的吸收效率,并通过结构参数的优化使吸收结构对特定红外波段的吸收率达到95%以上,在整个波长范围内平均吸收效率达32.6%。
Common method of building uncooled infrared sensors is to build cantilevers on CMOS circuit.Detectors changed temperature into voltage change or current signal and detected,the absorption efficiency of the structure is limited. This paper presents an infrared detector structure based on surface plasmon resonance to improve absorption efficiency. Through electromagnetic simulation of infrared absorption variation with the structure parameters,more than 95% absorption is reached within specified spectral band under optimized condition for this kind of detector. The average absorption efficiency was 32. 6% in whole wavelength range.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2017年第2期662-667,共6页
Bulletin of the Chinese Ceramic Society
基金
国家自然科学基金项目(11304020)
