Mg-Al共掺层数对ZnO薄膜性能的影响

Effect of Mg-Al Co-doped Layers on Properties of ZnO Thin Films

采用溶胶凝胶法在石英衬底上制备了Mg-Al共掺的ZnO薄膜,研究了不同旋涂层数对ZnO薄膜微观结构、表面形貌以及光学性能的影响。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外-可见分光光度计(UV-VIS)、PL光致发光光谱仪对样品进行了表征与测试。实验结果表明:Mg-Al共掺后的ZnO薄膜均呈现六角纤锌矿结构且沿C轴择优取向生长,薄膜层数的增加能够有效提升薄膜的结晶质量。同时Mg-Al共掺杂能够极大地拓宽ZnO薄膜在近红外光谱域的光透过率,平均透过率超过85%。

Mg-Al Co-doped ZnO thin films were prepared on quartz substrates by sol gel method. The effects of different spin coating layers on the microstructure, surface morphology and optical properties of ZnO thin films were studied. The samples were characterized and tested by X-ray diffraction （XRD）, scanning electron microscope （SEM）, ultraviolet visible spectrophotometer （UV-VIS） and PL photoluminescence spectrometer. The experimental results show that the ZnO thin films have hexagonal wurtzite structure preferentially oriented in c-axis direction. The increase of thin film layers can effectively improve the crystallinity of the thin films. At the same time, Mg-Al co-doping can greatly broaden the optical transmittance of ZnO thin films in the near infrared spectral domain, and the average transmittance is more than 85%.