类金刚石膜研究进展

Progress of Diamond-like Carbon Films

类金刚石膜具有高硬度、高热导率、低摩擦因数、良好的耐磨性能和化学惰性等优异的物化性能,在热沉、微电子、抗核加固、生物和汽车工业等领域具有重大的应用前景,近年来吸引了众多研究和关注。文章综述了类金刚石膜的研究进展和膜的成核机理,展示了类金刚石的应用前景,为该材料的研究和工业化应用提供思路和参考。

Diamond-like carbon（DLC）films had many unique and outstanding properties such as high thermal conductivity,high hardness,excellent chemical inertness,low friction coefficients and wear coefficients.The properties and combinations were very promising for heat sink,micro-electromechanical devices,radiation hardening,biomedical devices,automotive industry and other technical applications,more research and a lot of attention were attracted in recent years.The research progress of diamond-like films and the nucleation mechanism of film were summarized,and application prospect of DLC films were demonstrated.The aim of this paper is to provide insights on the research trend of DLC films and the industry applications.