激光干涉仪在高精度垂直度检测中的应用

Laser Interferometer Application in High Precision Detection of Verticality

为检测用于测量直角尺、方尺等的高精度垂直度测量仪的垂直度,采用激光干涉仪为主要测量工具,以基准法测量高精度垂直度测量仪的垂直度。根据激光干涉仪测量直线度、垂直度的原理,结合分析软件,对垂直度的测量方法进行了介绍,实验结果表明,采用激光干涉仪测量垂直度的方法简明准确,较为直观、方便、高效。

In order to measure the high precision detection verticality instrument for measuring right angle ruler and square, the laser interferometer system was used as the main measurement instrument to evaluate the verticality of the high precision vertical measuring instrument by reference approach. According to the principle of straightness and verticality measurement, the measurement methods of straightness and verticality were introduced combining evaluation methods of verticality. Experimental results show that the methods with laser interferometer to measure verticality are practical and more accurate,convenient and intuitive.