摘要
Quanta 400F扫描电镜为常规的大型精密仪器,在运行过程中常常会出现各种设备故障。做好扫描电镜日常管理工作,可提高其各部件的使用寿命。主要介绍了该扫描电镜一些常见的故障及排除方法,包括冷却循环系统故障和真空系统故障;另外还介绍了扫描电镜易耗损件的保养维护措施,包括灯丝和物镜光阑的保养及维护。
Quanta 400 scanning electron microscope is a large scale precision instrument, and various equipment faults would occur occasionally during the operation. The good daily maintenance and management of the scanning electron microscope can improve the service life of the components and parts. Some common faults and corresponding elimination methods of the scanning electron microscope were summarized, including the cooling circulatory system faults and vacuum system faults. Additionally, maintenance measures of the easy wear parts were also suggested, including the maintenance of filament and the objective aperture.
出处
《理化检验（物理分册）》
CAS
2017年第2期120-122,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
西安工业大学教学改革研究资助项目(13JGY09)
关键词
扫描电镜
故障分析
保养维护
scanning electron microscope
fault analysis
maintenance
