光学干涉法在航天阀门产品表面粗糙度测量中的应用

Application of optical interferometry in surface roughness measurement of aerospace valve products

航天阀门产品如活门壳体、阀芯等,其密封面处表面粗糙度的加工精度,对阀门密封性能起着至关重要的作用。采用垂直扫描光学干涉法,根据产品材质和表面形状等特性设置不同的测量参数,获得活门壳体平面形密封面、R形密封面和非金属阀芯密封面表面粗糙度的测量图像及测量结果。经测量不确定度分析,扩展相对不确定度小于10%,满足测量精度的要求,实现了毫米级小尺寸平面和曲面表面粗糙度的高精度非接触测量。

The machining precision of surface roughness of sealing surface of aerospace valve products,such as shutter shell and valve core,plays a very important role in valve sealing performance. According to different measurement parameters such as product material and surface characteristics,and then the surface roughness measuring image and results of the valve shell plane-shape sealing surface,the R-shape sealing surface and the non-metallic valve core sealing surface were obtained by vertical scanning optical interferometry. Uncertainty analysis of the measurement shows that the extension relative uncertainty is less than 10% which meets the measurement accuracy requirements. Conclusion is that non-contact measurement for surface roughness of the millimeter-level micro plane or curved surface is achieved with high-precision.