摘要
针对微机电系统(MEMS)器件的可靠性问题,通过大量的历史资料调研和失效信息收集等方法,针对微机电系统(MEMS)器件的可靠性问题,对冲击、振动、湿度、温变、辐照和静电放电(ESD)等不同环境应力条件下的MEMS惯性器件典型失效模式及失效机理进行了深入分析和总结,研究结果有利于指导未来MEMS惯性器件的失效分析和可靠性设计。
Reliability of MEMS inertial devices seriously affects the defense security and restricts the application.Aiming at typical application environments,such as shock,vibration,humidity,temperature,radiation and electrostatic discharge（ ESD）,typical failure modes and mechanisms of MEMS inertial devices are detailed analyzed and summed up and research results will benefit failure analysis and reliability design of MEMS inertial devices.
作者
陈俊光
谷专元
何春华
黄钦文
来萍
恩云飞
CHEN Jun-guang GU Zhuan-yuan HE Chun-hua HUANG Qin-wen LAI Ping EN Yun-fei(Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, The Fifth Electronic Research Institute of the Ministry of Industry and Information Technology, Guangzhou 510610, China Faculty of Automation, Guangdong University of Technology, Guangzhou 510006, China School of Electrical and Information, South China University of Technology, Guangzhou 510640, China)
出处
《传感器与微系统》
CSCD
2017年第3期1-5,13,共6页
Transducer and Microsystem Technologies
