摘要
设计并研究了基于压电效应的微机电系统(MEMS)仿生结构的三维矢量水声传感机理,包含基础结构的建模、定向探测分析,器件制备的基础研究及其相关测试。通过Ansys 15.0对器件进行了静态位移分布和应力分析仿真,借助扫描电镜和原子力显微镜对锆钛酸铅(PZT)压电薄膜进行了观察,对器件进行了扫频测试和指向性测试,谐振频率约为500Hz,输出电压峰-峰值为280mV。它对促进现代水声传感技术的发展和解决对液体环境中微弱信号的高精度定位、识别、探测等技术难题具有一定的科学和实用价值。
This paper designed and studied the three-dimensional underwater acoustic sensing mechanism of MEMS vector bionic hydrophone based on piezoelectric effect,including modeling of basic structure,analysis of directional detection,basic research of devices fabrication and related test.The static displacement distribution and stress analysis of the device have been simulated by Ansys 15.0.With the help of scanning electron microscopy and atomic force microscopy,Pb（Zr（0.53）Ti（0.47））O3（PZT）piezoelectric thin film was observed.The frequency sweeping test and directivity test were carried out and the resonance frequency is about 500 Hz,the peak-peak output voltage value is 280 mV.The obtained results have a certain scientific and practical values for promoting the development of modern underwater acoustic sensing technology and solving technical problems such as high precision position,identification and detection of weak signal in liquid environment.
出处
《压电与声光》
CAS
CSCD
北大核心
2017年第2期239-242,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(No.51605449)
山西省应用基础研究计划基金资助项目(No.201601D021064)
中北大学自然科学研究基金资助项目(No.XJJ2016027)
关键词
压电式
薄膜
仿生
悬臂梁
水听器
piezoelectric
film
bionic
cantilever beam
hydrophone
