基于二维振镜的多光谱集成靶标设计及应用

Multi-spectral target design and application based on two-dimensional galvanometer

为了提高基于二维振镜光轴平行性检测方法的检测精度,简化测量操作步骤,设计了一种基于二维振镜扫描系统的多光谱集成靶标。通过多光谱集成靶板与LED照明光源结合,解决一靶专用中需要频繁更换、反复调校靶板及光源的问题。利用二维振镜进行十字分划中心对准,提高CCD检测方法的测量精度;采用像差优化的卡塞格林准直系统,改善十字分划成像质量。通过光轴平行性检测实验,多光谱集成靶标校准精度达到了0.10mard,该精度满足多光谱光电系统光轴平行性高精度和自动化检测的要求。

In order to improve detection precision based on optical axis parallelism of two-dimensional galvanometer and simplify measurement procedure, a multi spectral integrated target based on two-dimensional galvanometer scanning system is designed. Through integration of multi spectral target plate and LED lighting source, problems of frequent replacement, repeated adjustment of target plate and light source in a special target are solved. Centering accuracy of CCD detection method is improved by using two-dimensional galvanometer, and Cassegrain collimation system with optimized aberration is used to improve quality of cross-sectional imaging. With optical axis parallelism test, calibration accuracy of multi spectral integrated target reaches 0.10mard, which meets requirements of high precision and automatic detection of optical axis parallelism of multi spectral opto-electronic systems.