5Meng W J,Eesley G L.Growth and Mechanical Anisowopy of TiN Thin Films[J].Thin Solid Films,1995,271:108-116.
6Valvoda V.Structure of thin films of titanium nitride[J].Journal of Alloys and Compounds,1995,219(1-2):83-87.
7Li W,He X,Li H.The effects of ion bombarding energy on the structure and properties of TiN films synthesized by dual ion beam sputtering[J].J.Appl.Phys.,1994,75:2002-2006.
8Park J,Kim D J,Kim Y K,et al.Improvement of the biocompatibility and mechanical properties of surgical tools with TiN coating by PACVD[J].Thin Solid Films,2003,435(1-2):102-107.
9Dion I,Roques X,More N,et al.EX vivo leucocyte adhesion and protein adsorption on TiN[J].Biomaterials,1993,14:712-719.
10Martin P J,Bandavid A.Review of the filtered vacuum arc process and materials deposition[J].Thin Solid Films,2001,394:1-15.
