摘要
本文通过介绍微电子器件制造的主要流程,概括了主要的微电子制造工艺技术以及这些技术的特点。在分析以往发展规律的基础上,结合当今微电子技术的现状,阐述了未来微电子发展的三个主要表现形式。
A general description of microelectronics fabrication technologies was presented in the sequence of its mainstream process.Together with it is the outline of the technology characteristics.According to these and its development history,future development of microelectronics technologies was summarized.
出处
《国防制造技术》
2009年第5期39-42,共4页
Defense Manufacturing Technology
关键词
微电子
制造技术
硅
砷化镓
氮化镓
microelectronics
fabrication technology
Si
GaAs
GaN
