悬臂梁式环形谐振腔微压传感器的研究

Study on Micropressure Sensors of Cantilever Beam Circular Resonant Cavity

针对传统微压传感器灵敏度低、体积大的问题,提出了一种新型悬臂梁式环形谐振腔微压传感器。首先理论分析了悬臂梁式环形谐振腔微压传感器的工作原理,然后对悬臂梁结构进行了建模仿真,同时也确定了悬臂梁和环形谐振腔的最佳结构参数,最后利用MEMS工艺在SOI材料上制备了该新型传感器。利用光学耦合测试平台,对所加工的环形谐振腔进行性能测试,实验测得环形谐振腔的Q值为7.75×10~4,传感器的灵敏度为31 pm/k Pa,可以满足微压传感器高灵敏度的要求。

In view of traditional micro pressure sensor has low sensitivity and big volume,a new type sensor of the ring resonator integrated on cantilever was presented.Firstly the working principle of micro pressure sensor of cantilever beam circular resonant cavity was theoretically analyzed.Meanwhile,the mechanical property of cantilever was simulated and the structural parameters of cantilever and micro-ring resonator were set up,finally the ring resonator and cantilever were manufactured on SOI using MEMS technology.The coupling testing system was built to test the transmission properties of the ring resonator.The experiment shows that the Q value of the ring resonator is 7.75×10^4 and the sensitivity of the sensor is 31 pm/k Pa.The result can meet the requirement of micro-pressure sensor with high sensitivity.