摘要
为了解决表面等离子器件尺寸过大、不能通用集成的问题,采用对称梯形、金属-介质-金属结构,设计了一种新型的能够光电集成的硅基波导。设计波导的芯层面积越大局域化强度更高,梯形波导顶角145°时局域因子能够达到96.8%;内部芯层越宽电场局域化程度越高,传输距离越长;当芯宽50nm时,梯形波导间距大于900nm能提高耦合效率、降低干扰的影响。
In order to solve the problem that the surface plasma device size is too large to be universally integrated, a new kind of optoelectronic integration silicon-based waveguide is designed by using symmetrical trapezoid and metal-medium-metal structure. The larger the core layer area of the designed waveguide is, the higher the localization strength is. When the trapezoidal waveguide angle reaches 145°, the local factor can reach 96.8 %. The wider the internal core layer is, the higher the degree of the electric field localization is, and the longer the transmission distance is. When the core is 50 nm wide and the trapezoidal waveguide spacing is larger than 900nm, it can improve the coupling efficiency and reduce the effect of interference.
出处
《实验技术与管理》
CAS
北大核心
2017年第3期52-54,59,共4页
Experimental Technology and Management
基金
2014年贵州省科学技术联合基金项目"基于DPSK低压电力线传输的远程抄表系统的应用与研究"(黔科合LH字[2014]7200号)
关键词
硅基波导
波导设计
光电集成
表面等离子
silicon-based waveguide
waveguide design
photoelectric integration
surface plasma
