The Effects of Substrate Thickness on the Properties of 1-3-2 Multi-element Piezoelectric Composites

1-3-2 multi-element piezoelectric composites were fabricated by the twice dice-filling technique using epoxy resin as matrix,lead zirconate-titanate piezoelectric ceramic(Pb(Zr,Ti)O_3,PZT)as functional material and silicon as decoupling material.The consistency of piezoelectric,

1-3-2 multi-element piezoelectric composites were fabricated by the twice dice-filling technique using epoxy resin as matrix, lead zirconate-titanate piezoelectric ceramic （Pb（Zr,Ti）O3, PZT） as functional material and silicon as deeoupling material.