基于新型谐振柱的高频波导滤波器的设计

Design of a High Frequency Waveguide Filter Based on a New Type of Resonant Column

为了减小加工误差对高频滤波器性能的影响,设计并加工了一款基于新型谐振柱的高频波导滤波器。首先设计了一个两腔波导滤波器,然后通过给腔内的方形脊两侧加载梯形凸台完成了滤波器的设计。运用Ansoft HFSS软件对滤波器进行了模型仿真和参数优化。仿真优化结果显示,滤波器中心频率为104 GHz,带宽约为3 GHz,插入损耗小于0.1 dB,回波损耗大于25 dB,且梯形凸台的加载有助于增强腔间耦合,将加工误差影响减小为原来的一半。最后用微电子机械系统(MEMS)工艺完成了滤波器的加工并对其进行了测试,测试结果与仿真结果大致吻合,为高频滤波器的设计和加工提供了参考。

In order to reduce the influence of the machining error on the performances of the high frequency filter,a high frequency waveguide filter based on a new type of resonant column was designed and fabricated.Firstly,a double-cavity waveguide filter was designed,and then the design of the filter was completed by loading the trapezoidal boss on both sides of the square ridge in the cavity.The model simulation and parameter optimization of the filter were carried out by the Ansoft HFSS software.The results show that the center frequency of the filter is 104 GHz,the bandwidth is about 3 GHz,the insertion loss is less than 0.1 dB,and the return loss is greater than25 dB.The loading of trapezoidal boss is helpful to enhance the coupling of cavities,and the influence of the machining error is reduced to half of the original machining error influence.Finally,the filter was fabricated by the micro-electromechanical system（MEMS）process,and then was tested.The test results are generally in agreement with the simulation results,which providing a reference for the design and processing of high frequency filters.